The Model 4700 Titan stepper provides an entirely new level of throughput and performance in the manufacture of thin film head (TFH) devices. With its expanded 55 x 18 mm image area ( or 22 x 44 mm ), the Model 4700 can expose the entire two-inch field width of TFH devices.

The Model 4700 extends the capabilities of Ultratech's proven 1700 and 2700 TFH lithography steppers. Using advanced alignment technology, isolation structure, substrate handling and illumination systems, the Model 4700 delivers high reliability, precise alignment control and greater productivity. The Model 4700 features a high speed linear motor stage with a thickness compensator that automatically adjusts for different product lots. In addition, the Model 4700's enhanced global alignment system increases throughput without loss of alignment accuracy.