The NPS-Z-15H is a piezo scanned flexure guided stage with integrated capacitance position sensors. This stage has been specifically designed with a hollow core, ideal for carrying a sample tip or optical fiber into the heart of any high-resolution microscope system. It features a front reference surface to allow integration with the NPS-XY-100A providing three axis positioning control.

The NPS-Z-15H is a piezo scanned flexure guided stage with integrated capacitance position sensors. It is capable of sub-nanometer resolution and reproducibility. This stage has been designed to have extremely low angular deviation as it scans. A hollow center means it is ideal for use in near field scanning optical microscopy (NSOM).

A optional fiber chuck is also available. It features a front reference surface to allow integration with the NPS-XY-100A providing three axis positioning control. For these applications see also the NPS-Z-15A and the NPS-Z15B.

* requires ADP-XY100/Z15H

Features

• > 15 micrometer travel with sub-nanometer resolution
• < 0.01% hysteresis and linearity error
• First resonant frequency > 900 Hz
• High bandwidths (> 200 Hz) and fast response times
• In-situ scanning and stepping response optimization
• Robust and reliable
• Super Invar construction

Applications

• Scanning Probe Microscopy
• NSOM · Atomic Force Microscopy
• Laser cavity tuning
• Interferometry
• Metrology

Suggested Controller

• NPS3110