The NPS-Z-15L is a piezo scanned flexure guided stage with integrated capacitance position sensors. It is capable of sub-nanometer resolution and reproducibility. This stage has been designed for high stiffness to move large loads of up to 5KG.

The NPS-Z-15L is a piezo scanned flexure guided stage with integrated capacitance position sensors. It is capable of sub-nanometer resolution and reproducibility. This stage has been designed for high stiffness to move large loads of upto 5KG. An optional tungsten carbide ball end piece is available to aid mounting of the actuator in situ.

Features

• > 15 micrometer travel with sub-nanometer resolution
• < 0.005% hysteresis and linearity error
• First resonant frequency > 8 kHz
• High bandwidths (> 1 kHz) and fast response times
• In-situ scanning and stepping response optimization
• Robust and reliable
• Super Invar construction

Applications

• Precision alignment of large masses, e.g. lenses, masks, wafer chucks and machine tools

Suggested Controller

• NPS3110