The NPS-XY-100A is a piezo scanned flexure guided stage with integrated capacitance position sensors. It is made of Super Invar and is capable of sub-nanometer resolution and reproducibility.

The NPS-XY-100A is a piezo scanned flexure guided stage with integrated capacitance position sensors. It is capable of sub-nanometer resolution and reproducibility. Finite element analysis of the flexure guidance mechanisms has reduced parasitic angular motions to less than 25 micro-radians over the full 100 micron range.

The Super Invar construction (CTE 0.3ppm K-1, c.f. Al at 23ppm K-1) minimizes thermal drift, which on a nanometer scale is very important. The unique isostatic mounting system ensures that stresses from the mounting system are properly relieved and establishes the center of the stage as the co-ordinate reference point.

Features

• > 100 micrometer travel in each axis with sub-nanometer resolution
• < 0.005% hysteresis and linearity error
• First resonant frequency > 350 Hz
• High bandwidths (> 50 Hz) and fast response times
• In-situ scanning and stepping response optimization
• Use with NPS-Z-15A or NPS-Z-15H for XYZ options
• Super Invar construction

Applications

• High Precision Microscopy
• AFM, SPM, NSOM
• Suggested Controller
• NPS3220

Related Products

• NPS-XY-100B (aluminium)