The NPS-XY-100B is a piezo scanned flexure guided stage with integrated capacitance position sensors. Made of Aluminum it is capable of sub-nanometer resolution and reproducibility.

The NPS-XY-100B is a piezo scanned flexure guided stage with integrated capacitance position sensors. It is capable of sub-nanometer resolution and reproducibility. Finite element analysis of the flexure guidance mechanisms has reduced parasitic angular motions to less than 25 micro-radians over the full 100 micron range.

The aluminium construction (CTE 23ppm K-1, c.f. SI at 0.3ppm K-1) increases thermal drift, which on a nanometer scale is very important. The unique isostatic mounting system ensures that stresses from the mounting system are properly relieved and establishes the center of the stage as the co-ordinate reference point.

The NPS-XY-100Boffers a cost-effective alternative to the SI version (NPS-XY-100A).

Features

• > 100 micrometer travel in each axis with sub-nanometer resolution
• < 0.005% hysteresis and linearity error
• First resonant frequency > 600 Hz
• High bandwidths (> 90 Hz) and fast response times (<10ms)
• In-situ scanning and stepping response optimization
• Robust and reliable
• Aluminium construction

Applications

• High Precision Microscopy
• AFM, SPM, NSOM

Suggested Controller

• NPS3220 or NPS3330