The XPS-Theta-Gamma-2A has been developed for applications requiring high speed positioning of mirrors in optical inspection and imaging systems. The mirror is simply fixed onto the tilting platform of the stage to provide > 2 milliradians of travel with sub micro-radian resolution.

The XPS-Theta-Gamma-2A has been developed for applications requiring high speed positioning of mirrors in optical inspection and imaging systems. The mirror is simply fixed onto the tilting platform of the stage to provide > 2 milliradians of travel with sub micro-radian resolution.

Features

• 2 milli-radians open loop range
• Enclosed mechanism for high stability and reliability
• High bandwidth
• Simple flexure design for low cost/high volume applications

Applications

• Precision beam steering
• Image jitter correction