The NanoSensor is a non-contact position measuring system based on the principle of capacitance micrometry. Two sensor plates (a Target and a Probe) form a parallel plate capacitor. The NXA series sensors have an active area of 12 sq. mm and is available in round shape.

The NanoSensor is a non-contact position measuring system based on the principle of capacitance micrometry. Two sensor plates (a Target and a Probe) form a parallel plate capacitor.

The spacing of these two plates can be measured, using the appropriate electronic controller, to better than 0.1nm, with a range up to 1.25 mm, a frequency response up to 5 kHz and linear to 0.02%. Because the NanoSensor¨ is a non contact method, it is free of hysteresis. No power is dissipated at the point of measurement.

Features

• Subnanometer position resolution
• Zero hysteresis
• Linearity error down to 0.02%
• Bandwidth up to 5 kHz
• Super Invar versions available
• Vacuum compatible options

Applications

• Stage control
• Microscopy
• Structural deformation
• Vibration control
• Materials testing
• Precision engineering
• Metrology
• Active Optics
• Precision Beam Steering