上海矽锐电子科技有限公司
Shanghai Keenness Electronic Technology Co.,Ltd.

NanoSensors - NXA Series

The NanoSensor is a non-contact position measuring system based on the principle of capacitance micrometry. Two sensor plates (a Target and a Probe) form a parallel plate capacitor. The NXA series sensors have an active area of 12 sq. mm and is available in round shape.

The NanoSensor is a non-contact position measuring system based on the principle of capacitance micrometry. Two sensor plates (a Target and a Probe) form a parallel plate capacitor.

The spacing of these two plates can be measured, using the appropriate electronic controller, to better than 0.1nm, with a range up to 1.25 mm, a frequency response up to 5 kHz and linear to 0.02%. Because the NanoSensor¨ is a non contact method, it is free of hysteresis. No power is dissipated at the point of measurement.

Features

  • Subnanometer position resolution
  • Zero hysteresis
  • Linearity error down to 0.02%
  • Bandwidth up to 5 kHz
  • Super Invar versions available
  • Vacuum compatible options

Applications

  • Stage control
  • Microscopy
  • Structural deformation
  • Vibration control
  • Materials testing
  • Precision engineering
  • Metrology
  • Active Optics
  • Precision Beam Steering

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