The NanoSensor is a non-contact position measuring system based on the principle of capacitance micrometry. Two sensor plates (a Target and a Probe) form a parallel plate capacitor. The NXB series sensors have an active area of 282 sq. mm and are available in round, square and rectangular shapes. They can be operated in two ranges; up to 250μm or up to 1250μm.

The NanoSensor is a non-contact position measuring system based on the principle of capacitance micrometry. Two sensor plates (a Target and a Probe) form a parallel plate capacitor.

The spacing of these two plates can be measured, using the appropriate electronic controller, to better than 0.1nm, with a range up to 1.25 mm, a frequency response up to 5 kHz and linear to 0.02%. Because the NanoSensor¨ is a non contact method, it is free of hysteresis. No power is dissipated at the point of measurement.

Features

• Subnanometer position resolution
• Zero hysteresis
• Linearity error down to 0.02%
• Bandwidth up to 5 kHz
• Super Invar versions available
• Vacuum compatible options

Applications

• Stage control
• Microscopy
• Structural deformation
• Vibration control
• Materials testing
• Precision engineering
• Metrology
• Active Optics
• Precision Beam Steering